| 摘要 |
<p>PURPOSE:To decrease the number of steps and to improve the yield rate, by providing a specified PLT pyroelectric thin film, a light receiving electrode thin film and electrode thin films, which are divided for every element. CONSTITUTION:A pyroelectric thin film 2, which is characterized by chemical formula Pb1-xLaxTi1-0.75xO3, a composition range of 0<x<0.15 and orientation of <001>, and a plurality of split electrode thin films 3 are provided on a substrate 1. A part of the substrate 1 beneath the pyroelectric thin film 2 is removed. A light receiving electrode thin film 5 is formed on the surface of the pyroelectric thin film 2 through an opening part 4 by evaporation and the like. At this time heat conduction in the direction of the film is less than heat conduction through the pyroelectric thin film 2. Said pyroelectric thin film 2 is not divided for every element. Therefore the number of steps is decreased. Polarization is not required, and the yield rate of the device can be improved.</p> |
