COMPOSITE PALLET FOR A REACTIVE ION ETCHING SYSTEM,申请号EP19840108097-传众专利搜索

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发明名称	COMPOSITE PALLET FOR A REACTIVE ION ETCHING SYSTEM
摘要
申请公布号	EP0134999(B1)	申请公布日期	1988.06.01
申请号	EP19840108097	申请日期	1984.07.11
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	PAVONE, PETER J.;VAN DEMARK, RICHARD D.
分类号	H01L21/687;H01L21/302;H01L21/00;H01L21/3065;(IPC1-7):H01L21/306;C23C14/34	主分类号	H01L21/687
代理机构		代理人
主权项
地址

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