| 摘要 |
PURPOSE:To realize a stable preionization discharge, to stabilize a glow discharge in a main discharge process, and to ensure an easy replacement for preionization electrodes by a method wherein preionization electrodes are provided on both sides of main electrodes, and the preionization electrodes are constituted of preionization electrode main bodies and corrosion-resistant electrode pins removable from the main bodies. CONSTITUTION:Charges stored in a capacitor C1 travel to a capacitor C2 through preionization electrodes 3 and 4 upon closing of a switch SW, when a spark discharge occurs spontaneously across a gap 5 between the preionization electrodes 3 and 1 for the generation of ultraviolet rays UV for the ionization of the gas sealed in the device. In the presence of an adequate level of preionization, the charges in the capacitor C2 cause a homogeneous glow to take place for an excimer laser transition in a gap between main electrodes 1 (cathode) and 2 (anode) in a very short period of time. With the preionization electrodes 3 and 4 being provided with removable tips 3, and 1, made of such a corrosion-resistant material as nickel, preionization discharge may be accomplished with stability. |
