| 摘要 |
PURPOSE:To prolong the service life of a target itself and to prevent impurities from being mixed into a sputtered film and to obtain the titled device capable of stably forming the superior-quality film by making the thickness of the part in an erosion region of the target thicker than the thickness in the other region. CONSTITUTION:A magnet 2 is arranged on a cathode main body 1 and a target 4 fixed with a bonding material 5 is provided on a backing plate 3 put thereon. Further the target 4 is constituted as one body and the thickness of the parts in erosion regions A thereof is constituted so that it is made thicker than the thickness of the other parts B and the service life is prolonged all the more because the target 4 can be continuously used for a long period. Since the target 4 is not divided, the plate 3 and the bonding material 5 are not sputtered. Therefore a superior-quality film can be stably obtained without contamination of the sputtered film by these impurities. |
