| 摘要 |
PURPOSE:To obtain a conductor which lowers specific resistance and surface roughness and has high adhesive strength to an insulating layer by forming the conductor into three-layered structure, and forming the lowermost layer of 'Permalloy(R)', the intermediate layer of Au and the uppermost layer of Cr. CONSTITUTION:The conductor of a thin film magnetic head is constituted into the three-layered structure. The lowermost layer thereof is constituted of the 'Permalloy(R)' layer 11, the intermediate layer of the Au layer 12 and the uppermost layer of the Cr layer 13. The film thickness are set at 100Angstrom for the 'Permalloy(R)' layer 11, 3,000Angstrom for the Au layer 12 and 50Angstrom for the Cr layer 13. The quantity of the diffusion of Cr into the Au layer 12 is decreased and the specific resistance and surface roughness after the formation of the conductor is lowered by such constitution. The conductor the above-mentioned specific resistance and surface roughness of which are not deteriorated even after a heat treatment of a sputtering stage for an SiO2 film, etc. is obtd.,; in addition, the conductor having the high adhesive strength to the insulating layer 14 to be formed on the conductor is obtd.
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