ELECTRICALLY CONDUCTIVE SOLID LUBRICATIVE FILM

摘要

PURPOSE:To make a lubricative film electrically conductive and to improve the mechanical properties of the film by sputtering a fluoropolymer contg. chlorine as a target with one or more kinds of plasma gases selected among inert gases, gaseous fluorocarbons and gaseous oxygen. CONSTITUTION:Substrates 3 are fixed in a substrate holder 2 in a vessel 1 and a target 4 is set. A sheet or film of a fluoropolymer contg. chlorine such as polychlorotrifluoroethylene is used as the target 4. The vessel 1 is evacuated to a prescribed pressure in two steps with a rotary oil pump 10 and a diffusion oil pump 9 and the whole vessel 1 is heated with a heater 16. One or more kinds of plasma gases selected among the inert gases such as Ar and He, gaseous fluorocarbons such as CF4 and freon and gaseous O2 are then introduced to a set pressure from a plasma gas cylinder 15 and plasma is stably generated by impressing high frequency voltage to an electrode 6 from a power source 8.