| 摘要 |
PURPOSE:To form a thin film having an excellent property over a long time by using a discharge electrode also as a heater for heating a substrate to facilitate the temperature control of a substrate film forming surface. CONSTITUTION:Since it has a substrate holder 3 for holding a substrate 2 for forming a thin film and a discharge electrode 4 disposed oppositely to the holder 3 and used also as a heater for heating the substrate, the electrode 4 itself is heated to the temperature near the substrate temperature. Thus, since material gas decomposed by a glow discharge does not become powder on the electrode 4 but becomes a dense thin film to be adhered, the discharge and the generation of a plasma are stabilized to form a thin film having excellent property. A frequency cleaning is not necessary, and the film formation for a long time and the repetition of the film formation can be performed. Further, since the electrode 4 near the substrate 2 oppositely to the film forming surface is used also as the substrate heater, the film forming surface of the substrate 2 can be directly heated to properly and easily control the temperature of the film forming surface.
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