| 摘要 |
<p>PURPOSE:To decrease man-hour by using a thin pyroelectric film which is expressed by the chemical formula PbLaTi and in which >=75% of polarization axes are oriented in one direction and electrodes which are formed as thin films so as to have the heat transmission in the film direction smaller than the heat transmission by the thin pyroelectric film. CONSTITUTION:A thin Pt film is formed to 0.1-0.4mum by sputtering as the thin electrode film on an MgO single crystal substrate 1 which is cloven at (100) and is polished to a specular surface. Pb1-xLaxTi1-0.75xO3 (PLT) is then grown as the thin pyroelectric film 3. After the plural thin photodetecting electrode films 4 consisting of NiCr are finally deposited by evaporation on the thin film 3, the taking out electrodes 5 are prepd. Further, the MgO substrate 1 in the lower part of the thin film 3 is etched by hot concd. phosphoric acid to provide an aperture 6. Then, the pyroelectric type IR array element is so constituted as not to separate the thin pyroelectric film by each element and, therefore, the man-hours are decreased.</p> |
