| 摘要 |
PURPOSE:To increase the filtrating capacity substantially by performing processing liquid filtrating action and the sludge scrape-off action alternately at certain intervals, and thereby obtaining efficient filtration of the processing liquid without causing clog to the filtrating member. CONSTITUTION:If a control device 13 judges that a certain specified period of time has passed with processing liquid filtrating action made by a filtrating member 5, solenoid valves 14, 17 are closed by control signals C1, C2, while solenoid valves 20, 23 opened by control signals C3, C4. Compressed air from a compressed fluid source 21 is supplied to the bottom chamber 2b, and sludge 22 attached to the top chamber 2a side of filtrating member 5 is scrapped off to eliminate clogging, and now the compressed air intruded in the top chamber 2a via the filtrating member 5 is released to the atmosphere through a pipe 19. Action to scrape off the sludge 22 is implemented for a certain period of time, followed by restitution to the condition for filtration of processing liquid, which will now be conducted with good performance.
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