METHOD OF CLEANING TOOLS,申请号JP19860268217-传众专利搜索

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发明名称	METHOD OF CLEANING TOOLS
摘要
申请公布号	JPS63123887(A)	申请公布日期	1988.05.27
申请号	JP19860268217	申请日期	1986.11.10
申请人	NEC CORP	发明人	YAMAMOTO YUICHI
分类号	C04B41/80;C04B41/89;C04B41/91;H01L21/22	主分类号	C04B41/80
代理机构		代理人
主权项
地址

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