| 摘要 |
PURPOSE:To enable the full contrast detection of an image of scanning transmission electron beams by selecting outputs of respective photoelectric conversion elements synchronously with the scanning on a scintillator and detecting a fine pattern on a sample by the use of these selective outputs. CONSTITUTION:When scanning transmission electron beams 1b for a sample 5 are scanned on a scintillator 10, diameters of luminous spots formed on respective scanning positions are made smaller than sizes of respective elements of a corresponding photodiode array 15. When a period of repetitive scanning on the scintillator 10 is set longer than afterglow time on the respective scanning positions, outputs of respective elements of the diode array 15, which detects only light spots formed by the use of scanning operations performed synchronously with the scanning on the scintillator 10 at the respective scanning positions so that no aftergrow effect is brought at the adjacent scanning positions and present scanning positions, can be selectively outputted. Hence, a fine pattern on this sample 5 can be detected with high speed and high resolution and without the afterglow effects on the scintillator 10.
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