| 摘要 |
PURPOSE:To perform the measurement of an object under test with high accuracy, by the constitution wherein a circuit board, to which probes are attached, can be rotated in a plane. CONSTITUTION:Probes 5 are attached to a first circuit board 2. A second substrate 3 is connected to an inspecting circuit for measurement, which is electrically connected to said first substrate 2. A mechanism which can rotate said first board 2 is provided. For example, the first doughnut type circuit board 2 is constituted so that it can be rotated in the direction of theta by the maximum value of + or -3 deg. by the screwing action, which is obtained by rotating a screw 9 that is engaged with a rotary shaft 8. The screw 9 is rotated with an electric motor 7. The rotary shaft 8 can be extended and contracted. Thus the arranging pattern of the tips of the probes 5, which are attached to a probing card 1, and the arranging pattern of the electrode pads of a semiconductor chips are adjusted so that the patterns face to each other. The patterns are connected and their position alignment becomes easy. Thus the object under test can be measured highly accurately.
|
