| 摘要 |
PURPOSE:To promote ionization and to form a food film and also to eliminate the need for an electrode by introducing microwave into the interval reaching a base plate from a vapor deposition source and providing a means for impressing a magnetic field in the vicinity of the base plate. CONSTITUTION:A magnet 6 is provided to the rear surface of a holder for a base plate. The intensity of the magnetic field caused by the magnet 6 is regulated so that electron cyclotron resonant conditions decided with the frequency of microwave are satisfied in the vicinity of the surface of the base plate 3. Oxygen is introduced into a vacuum tank 9 and a vapor depositing material 5 is evaporated from a vapor deposition source 1 incorporated with the vapor depositing material 5. Electron cyclotron discharge is caused near the surface of the base plate 3 by propagating microwave of about 200W generated in a magnetron 7 on the surface of the base plate 3. Thereby a film is formed on the base plate 3 by the vapor depositing material 5, excitation of oxygen and ionized particles. Ionization is promoted by this method and the superior-quality film is obtained.
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