| 摘要 |
PURPOSE:To irradiate a sample with laser light over a wide range by calculating a laser light irradiation position in every visual field of a microscope and repeating this operation. CONSTITUTION:Laser light from a laser light source 1 is converged into a fine spot through an optical interface 2 within the visual field of the optical microscope 4 and the spot position is moved in two dimensions by an optical path deflection optical system 5. The state of the sample is picked up by a TV camera 8 and stored in a frame memory 11 and when samples are scattered over a plane, position information on the center coordinates of particles and the specific position of many particles is calculated and stored in a memory 14. Then the stored center coordinates are read successively, the optical system 5 is driven by an optical path controller 15 to converge the laser beam on coordinate points, and the laser light is projected by laser sighting. A sampling table 18 is moved by a stage controller 16 after the laser light irradiation and an adjacent sample surface is irradiated with the laser light similarly as well as the automatic sighting, thereby projecting the laser light over a wide range.
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