发明名称 |
Automatic developing apparatus |
摘要 |
An automatic developing apparatus comprises a developing tank and a pipe for introducing a developing solution into the developing tank. The developing tank is constituted by a stage on which a substrate is to be set, and a processing case movable relative to the stage, to receive said stage.
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申请公布号 |
US4745422(A) |
申请公布日期 |
1988.05.17 |
申请号 |
US19860930925 |
申请日期 |
1986.11.17 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
MATSUOKA, YASUO;USUDA, KINYA;TAKANO, MICHIRO |
分类号 |
G03F7/30;(IPC1-7):G03D3/02 |
主分类号 |
G03F7/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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