发明名称 Automatic developing apparatus
摘要 An automatic developing apparatus comprises a developing tank and a pipe for introducing a developing solution into the developing tank. The developing tank is constituted by a stage on which a substrate is to be set, and a processing case movable relative to the stage, to receive said stage.
申请公布号 US4745422(A) 申请公布日期 1988.05.17
申请号 US19860930925 申请日期 1986.11.17
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 MATSUOKA, YASUO;USUDA, KINYA;TAKANO, MICHIRO
分类号 G03F7/30;(IPC1-7):G03D3/02 主分类号 G03F7/30
代理机构 代理人
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