| 摘要 |
PURPOSE:To detect whether or not there is a fine projection and its formation position without being affected by the irregularity of the surface of a sample by making a linear detector detect the scattered light of laser light scanned along the flank of a body to be measured by a mirror. CONSTITUTION:The scattered light from the flank obtained with a laser scanning ray 25 which can be scanned outward by a horizontal scanning mirror 2 nearby the flank of a convex product 14 of the kind at right angles to a rotating shaft 27 is photodetected by a detection part 13 installed nearby the laser scanning beam 25 so that the laser scanning ray 25 is not photodetected directly. Then its output signal is inputted to a photoelectric conversion part 8. The flank end and fine projection tip of the sample are discriminated from a time series signal obtained by the photoelectric conversion to detect whether or not there is the fine projection and its formation position.
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