| 发明名称 |
Method and structure for crystallizing a film |
| 摘要 |
A method and structure for crystallizing film is disclosed. The method includes the steps of forming a film on a substrate, forming a lens on the film to focus an electromagnetic wave on the film and directing the electromagnetic wave on the film inclusive of the lens to crystallize the film.
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| 申请公布号 |
US6610998(B1) |
申请公布日期 |
2003.08.26 |
| 申请号 |
US20000577823 |
申请日期 |
2000.05.25 |
| 申请人 |
GOLDSTAR ELECTRON CO., LTD. |
发明人 |
PARK MIN HWA |
| 分类号 |
H01L21/20;H01L21/336;H01L29/786;(IPC1-7):H01L21/84;H01L29/04 |
主分类号 |
H01L21/20 |
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