| 摘要 |
PURPOSE:To minimize deterioration of quality of superpure water due to passing through tubes, by providing subsystems near semiconductor cleaning apparatuses. CONSTITUTION:Raw water 4 is treated by a primary water processing apparatus 3 and primary pure water is supplied to subsystems 7A-7C through a tube 5 of PVC or the like. Superpure water obtained from the subsystems 7A-7C is supplied to cleaning apparatuses 1A-1C through tubes 9A-9C, respectively, and cleaned. The tubes 9A-9C and 13A-13C made of ethylene fluoride in which impurities are hardly dissolved and in which bacteria hardly propagate are particularly effective for ensuring high quality of water. |
