MANUFACTURE OF ELECTROPHOTOGRAPHIC SENSITIVE BODY

摘要

PURPOSE:To dispense with the protective layer and the barrier layer of photosensitive body and to prevent ghost phenomenon by decomposing a gas mixture of He and a gas containing an element of group IIIa of the periodic table through glow discharge to form a photoconductive layer. CONSTITUTION:The gas for producing amorphous silicon carbide (a-SiC) is decomposed by glow discharge to form a positively chargeable photoconductive layer 5a made of a-SiC on a substrate 1. As said gas, a mixture of C2H2 and an Si-containing gas in a ratio of 0.01:1-3:1 further containing an element of group IIIa of the periodic table is used. The photoconductive layer 5a made of a-SiC composed of layer regions 6, 7 is formed on the conductive substrate 1. The layer region 7 is prepared by adding He to a gas mixture of C2H2 and the Si-containing gas in a ratio of <=5:1, and it contains the element of group IIIa in an amount of 10<-6>-1mol% and the layer region 6 contains said element more than the layer region 7. The content of C in the layer regions 6, 7 may be changed.