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发明名称
摘要
申请公布号	JPS6371530(U)	申请公布日期	1988.05.13
申请号	JP19860165780U	申请日期	1986.10.30
申请人		发明人
分类号	G05D16/00;B29C45/02;B29C45/14;B29C45/77;B29L31/34;H01L21/56;(IPC1-7):H01L21/56;B29L31:34	主分类号	G05D16/00
代理机构		代理人
主权项
地址

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