| 摘要 |
PURPOSE:To measure the stock removal of one end face of a light interference part accurately as well as to make the stock removal of a workpiece securable, by installing this light interference part and a stock removal measuring part connected to the former in a polishing base plate. CONSTITUTION:A polisher 2 is rotated and driven, and the workpiece A locked to the bottom of a polishing base plate 4 and a lower end face 11b of the light interferecne part 7 installed in the base plate 4 both are polished simultaneously and as far as the same degree. At this time, light incident out of a stock removal measuring part 8 is irradiated to a reflecting film 12 of the light interference part 7, while strength and variation number in interference light of two reflected lights reflected each at this reflecting film 12 and the lower end face 11b of an etalon part 11 counted by a photo detector 17, and size variation between bot upper and lower end faces 11a and 11b of the etalon part 11, namely, stock removal in the lower end face 11b is measured from a wavelength of service light. The stock removal of the workpiece A is obtainable out of this stock removal.
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