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发明名称
SEMICONDUCTOR MANUFACTURING SYSTEM
摘要
申请公布号
JPS6399600(A)
申请公布日期
1988.04.30
申请号
JP19860245821
申请日期
1986.10.15
申请人
MITSUBISHI ELECTRIC CORP
发明人
SHIMAMOTO HARUO
分类号
H01L21/67;H01L21/68;H05K13/02
主分类号
H01L21/67
代理机构
代理人
主权项
地址
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