Method of making isolating trenches in layers composed of transparent conductive metal oxides such as those used for front electrodes in the series interconnection of thin-film solar cells in modules

摘要

In a method for making isolating trenches (4) in layers (3) composed of transparent conductive metal oxides, the isolating trench pattern (4) is fabricated on the transparent substrate (1) using a screen-printing paste (2) before the metal oxide layer (3) is applied and after the metal oxide layer (3) is deposited the paste pattern (2) with the metal oxide layer (3) on it is removed by means of the so-called lift-off technique (5) in an ultrasonic bath. The method is used in the series interconnection of thin-film solar cells to form solar-cell modules.