| 摘要 |
PURPOSE:To remove he dispersion of pulse discharge, and to stabilize pulse oscillation by applying a pre-pulse voltage group having pulse power not exceeding laser oscillation threshold before applying pulse voltage. CONSTITUTION:When a pre-pulse signal 28 having pulse width number of several mus-several dozen mus is transmitted to a control terminal 10, pre-pulse discharge 29 is generated in a discharge section 16 in response to the reception of the signal 28. Pulse discharge power at that time is controlled by a pulse generator 14 so as not to exceed a laser oscillation threshold. A main pulse signal 30 is generated from the pulse generator 14, main pulse discharge 31 is generated, and a pulse laser output 32 corresponding to the main pulse discharge is acquired. Main pulse voltage is applied in the state in which a gas ionized by pre-pulse discharge is left in a discharge tube, thus displaying an effect on the stabilization of pulse discharge. |
