| 摘要 |
<p>PURPOSE:To standardize the probe of a measuring jig and to make it possible to provide a production system characterized by redundancy, by forming characteristic measuring electrodes at the standardized specified positions on an insulating film which is formed on a semiconductor chip, and connecting the electrodes to electrodes which are formed at positions determined by the arrangement of the elements of the semiconductor chip by way of an insulating film. CONSTITUTION:Characteristic measuring electrodes 2 are formed on an insulating film 3 and connected to electrode wiring 4 by way of contact holes 5. Therefore, the electrodes 2 are formed at the standardized specified positions without any restriction on the freedom of the arrangement of the circuit elements of a semiconductor chip 1. The characteristic measuring electrodes 2 are provided at the standardized position. The probe of a measuring jig for measuring the characteristics can be standardized, and the measuring jig can be commonly used for plural kinds of chips. Thus a production system characterized by redundacy can be readily obtained.</p> |
