| 摘要 |
A process for depositing diamond (12) onto a substrate (14), which is of particular utility in fabricating very thin layers of diamond. Diamond (12) is deposited by chemical vapor deposition of a hydrocarbon vapor wherein the carbon atoms are saturated and the ratio of hydrogen atoms linked to carbon atoms is less than 2. That is, the carbon atoms of the hydrocarbon are bonded by single bonds at an angle near 109.5 degrees, the same angle required for the carbon atoms in the deposited diamond. The limited number of hydrogen atoms ensures a compact structure for the hydrocarbon, and reduces the system burden of removing excess hydrogen upon deposition. The polycyclic alkanes exhibit the required structures. Preferred hydrocarbons include adamantane (Fig. 2), congressane (Fig. 3), cubane (Fig. 4), and basketane (Fig. 5). |
