| 摘要 |
<p>A gas scavenger unit (50,98) educts gases away from semiconductor wafers (20) as they are withdrawn through a plenum (54) in the scavenger from their processing chamber (40) into the atmosphere. The scavenger (50,90) has a peripheral wall (52) which generally defines a plenum (54) hving two open ends. The one end (56) of the plenum (54) communicates with the processing chamber (40) and the other end (58) communicates with the atmosphere. An exhaust port (61) in the peripheral wall (52) communicates with a house gas exhaust system (62). The plenum (54) is divided into two chambers (80, 82 or 92, 94) by an apertured interior wall (70,96). The wafers (20) travel through the first chamber (80,92) and the second chamber (82,94) communicates with the house gas exhaust system (62). The apertures (76) in the interior wall (70,96) are disposed about the wafer travel path so that gases from the processing chamber and/or the atmosphere are educted into the house exhaust system (62) without flowing across the wafers (20).</p> |
