| 摘要 |
<p>PURPOSE:To protect a wafer from sticking of dust, by installing bellows on the periphery of a ball screw so as to envelop the ball screw interlocking with a motor. CONSTITUTION:On a frame 7 on the top part of a rotary axis 5, a stepping motor 8, a ball screw q interlocking with this motor, and a ball screw type carrying mechanism, in which a nut 10 engages with the ball screw through balls, are installed so that an arm 4 can be carried freely forward and backward in the longitudinal direction of this mechanism. Besides, bellows 11 are installed on the periphery of the ball screw 9 so as to surround the screw. Therefore, dust generated on the ball screw 9 in the bellows 11 on the periphery of the screw and does not swirl up, so that the wafer 3 is protected from the dust and excellent vacuum processing can be obtained.</p> |
