| 摘要 |
PURPOSE:To execute the uniform surface treatment without effect of thermal strain by applying laser beam under condition of bringing the other face of sample into contact with a sample holding table and also pushing both end part of longitudinal direction to the sample holding table. CONSTITUTION:The thin rectangle sample 11 is laid on the upper face of sample table 10 cooled by cooling system and the both end part along the longitudinal direction of this sample 11 is pushed to the sample holding table 10 by holding plates 12a, 12b. Next, the sample table 10 is set on a carrying mechanism under Ar gas or air and while shifting the sample table 10 toward the direction shown by the arrow mark 13 at the constant speed, the laser beam 14 set beforehand at the prescribed spot diameter form a laser beam source is applied, to execute surface treatment. In this way, even if the sample is extremely thin plate-shaped or tape shaped, uniform surface treatment without effect of any thermal strain is possible. |
