发明名称 Process for developing implanted buried layer and/or key locators
摘要 The present invention consists of a process of blanket implanting a key area and buried layer without the use of nitride or thick oxide layers. The key area is then etched leaving the surface of the key area below the surface of the buried layer. Upon growing an epitaxial layer, the key area will be identifiable by a step in the surface of the epi layer.
申请公布号 US4737468(A) 申请公布日期 1988.04.12
申请号 US19870037909 申请日期 1987.04.13
申请人 MOTOROLA INC. 发明人 MARTIN, JOHN E.
分类号 H01L21/74;H01L23/544;(IPC1-7):H01L21/265;H01L21/31 主分类号 H01L21/74
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