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发明名称
ULTRAVIOLET WASHER
摘要
申请公布号
JPS6378530(A)
申请公布日期
1988.04.08
申请号
JP19860221824
申请日期
1986.09.22
申请人
HITACHI LTD
发明人
ISHIKAWA MEGUMI;OTAKE MITSUYOSHI
分类号
B08B7/00;H01L21/027;H01L21/30;H01L21/304
主分类号
B08B7/00
代理机构
代理人
主权项
地址
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