| 摘要 |
PURPOSE:To secure the uniformity of scattering by providing a means which produce an electric field in a container for scattering and a means which charges spacers electrostatically. CONSTITUTION:A substrate 16 is installed at the bottom in the container 14 from an entrance and exit 15 and a specific amount of a spacer material 18 is put in a receiving pan 17. Then while A DC high voltage is applied between both upper and lower electrodes 21 and 22, the conductive pan 18 which is connected electrically to the upper electrode 21 is turned over and a valve 20 is opened simultaneously to blow the spacer material 18, which is scattered in the container 14. The spacer material 18 is charged electrostatically to the same potential with the upper electrode 21 and the electric field is applied between the upper and lower electrodes 21 and 22 in the space in the container 14, so the material falls on the lower electrode 22 having the different polarity while accelerated. At the time of this falling, spacers repel one another, so they are hard to gather together. Consequently, the material is scattered uniformly on the substrate. |
