| 摘要 |
PURPOSE:To economically and safely repeatedly operate an N2 laser by containing the laser in a vessel, filling nitrogen gas therein, and forcibly circulating the gas between the laser main electrode and discharging electrodes of a gap switch. CONSTITUTION:N2 laser 4 is contained in a vessel 1. A switching valve is first opened in case of operating the laser 4 to introduce N2 into the vessel 1, the valve is then opened at the outlet 3 side, and the air in the vessel 1 is replaced with N2. When a fan 21 is rotated in the state that N2 is filled in the vessel 1, N2 is introduced to the discharging space formed of the discharging electrodes 13, 14 of the laser main electrode 10, and opened within the vessel 1 through the electrode 13 and a printed substrate 6. A fan 25 is simultaneously operated, and N2 is fed to the discharging space formed of the discharging electrodes 16, 17 of a gap switch 15. Accordingly, ions remaining in the discharging space of the electrode 10 and the switch 15 are efficiently removed, and the laser 4 can be highly repeatedly operated. |
