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发明名称
A REACTIVE ION ETCHING PROCESS
摘要
申请公布号
EP0206055(A3)
申请公布日期
1988.04.06
申请号
EP19860107740
申请日期
1986.06.06
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
BIANCHI, JACQUELINE KAY;GDULA, ROBERT ANTHONY;LANGE, DENNIS JOHN
分类号
C04B41/53;C04B41/91;H01L21/311;(IPC1-7):C04B41/91;H01L21/31
主分类号
C04B41/53
代理机构
代理人
主权项
地址
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