Semiconductor integrated pressure transducer.

摘要

A semiconductor integrated pressure transducer in which a semiconductor substrate incorporating a hermetically sealed system comprises a first chamber (1) communicating with a second chamber (2) via a capillary (3) wherein the first chamber containing a fluid and having at least one portion of a wall in the form of a deformable membrane separating the atmosphere within the chamber from that external to the sensor, the second chamber containing a compressible gas and having rigid walls; and the capillary being partially filled with electrically conducting liquid (6), the liquid physically separating the fluid in the first chamber from the gas in the second chamber, the wall of the capillary being at least in two separated regions electrically conductive (4, 5) such that in use at a predetermined external atmosphere pressure the electrically conductive liquid makes contact with both electrically conductive regions thereby completing a electrical circuit.