发明名称 |
Photosensitive composition and pattern forming process using same |
摘要 |
A photosensitive composition comprising (1) at least one diazonium compound selected from among salts and double salts of diazonium ions represented by the general formulas: <IMAGE> [I] wherein A stands for a substituent selected from among <IMAGE> [II] <IMAGE> wherein R1 and R2 each stand for an alkyl or benzyl group with the proviso that the total number of carbon atoms of R1 and R2 is 8 to 16, and (2) at least one nitrate selected from the group consisting of calcium nitrate and magnesium nitrate and a pattern forming process using such a composition. This composition gets sticky upon exposure to light.
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申请公布号 |
US4735880(A) |
申请公布日期 |
1988.04.05 |
申请号 |
US19860852750 |
申请日期 |
1986.04.16 |
申请人 |
HITACHI, LTD. |
发明人 |
MORISHITA, HAJIME;NONOGAKI, SABURO;HAYASHI, NOBUAKI;UCHINO, SHOICHI;NISHIZAWA, MASAHIRO;MIURA, KIYOSHI;SASAYA, OSAMU;TOMITA, YOSHIFUMI |
分类号 |
G03F7/038;G03C1/60;G03F7/28;H01J9/227;(IPC1-7):G03C5/34;G03C5/18;G03F7/08;G03F7/26 |
主分类号 |
G03F7/038 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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