发明名称 Photosensitive composition and pattern forming process using same
摘要 A photosensitive composition comprising (1) at least one diazonium compound selected from among salts and double salts of diazonium ions represented by the general formulas: <IMAGE> [I] wherein A stands for a substituent selected from among <IMAGE> [II] <IMAGE> wherein R1 and R2 each stand for an alkyl or benzyl group with the proviso that the total number of carbon atoms of R1 and R2 is 8 to 16, and (2) at least one nitrate selected from the group consisting of calcium nitrate and magnesium nitrate and a pattern forming process using such a composition. This composition gets sticky upon exposure to light.
申请公布号 US4735880(A) 申请公布日期 1988.04.05
申请号 US19860852750 申请日期 1986.04.16
申请人 HITACHI, LTD. 发明人 MORISHITA, HAJIME;NONOGAKI, SABURO;HAYASHI, NOBUAKI;UCHINO, SHOICHI;NISHIZAWA, MASAHIRO;MIURA, KIYOSHI;SASAYA, OSAMU;TOMITA, YOSHIFUMI
分类号 G03F7/038;G03C1/60;G03F7/28;H01J9/227;(IPC1-7):G03C5/34;G03C5/18;G03F7/08;G03F7/26 主分类号 G03F7/038
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