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发明名称
MANUFACTURE OF MULTILAYER INTERCONNECTION
摘要
申请公布号
JPS6373648(A)
申请公布日期
1988.04.04
申请号
JP19860220000
申请日期
1986.09.17
申请人
SANYO ELECTRIC CO LTD
发明人
WADA TOSHIO;SAKAMURA SHOJI
分类号
H01L21/768;H01L23/522
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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