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发明名称
X-RAY EXPOSURE DEVICE
摘要
申请公布号
JPS6372116(A)
申请公布日期
1988.04.01
申请号
JP19860215716
申请日期
1986.09.16
申请人
HITACHI LTD
发明人
MOCHIJI KOZO;HAYATA YASUNARI;KUNIYOSHI SHINJI;KIMURA TAKESHI
分类号
H01L21/30;G03F7/20;H01L21/027
主分类号
H01L21/30
代理机构
代理人
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地址
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