| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray source which can exhibit high performance in observing a microscopic material by sealing a field emission micro electron source in which an emitter chip, an extraction electrode and a focusing electrode are integrally formed and an anode having a cooling means, in a vacuum vessel. SOLUTION: A medium sized conical projection 15 is formed in the center of a metallic or semiconductor plate 14, and an emitter chip 11 having the pointed tip having extremely small curvature and a microfield emitter 10 composed of an electron extraction electrode 12 and a focusing electrode 13 integrally formed so as to surround this, are provided in a cathode 22. An anode 23 which is composed of a thin plate of W, Cu, Cr, Fe, Co or the like and in which a cooling pipe line 24 is arranged, is formed, and the cathode 22 and the anode 23 are sealed in a vacuum vessel 21, and a window 25 which introduces X-rays generated from the anode 23 to a sample and is covered with a thin film of Be and Al, is formed in the vacuum vessel 21. Therefore, an electron emitted from the tip of the emitter chip 11 can be converted into an electron beam not more than about 0.1μm on the anode, and is useful for an X-ray microscope or the like.
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