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发明名称
MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPS6370554(A)
申请公布日期
1988.03.30
申请号
JP19860213863
申请日期
1986.09.12
申请人
HITACHI LTD
发明人
KOBAYASHI YUTAKA;OBAYASHI MASAYUKI;IKEDA TAKAHIDE;MIYAZAWA HIROYUKI;TANBA NOBUO;HORI RYOICHI;KITSUKAWA GORO;ITO KIYOO
分类号
H01L27/06;H01L21/8249
主分类号
H01L27/06
代理机构
代理人
主权项
地址
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