Integrated fiber optic coupler for VHSIC/VLSI interconnects

摘要

An integrated fiber optic coupler useful for the optical transmission of data from a light source to a detector located on a semiconductor chip which comprises a semiconductor wafer with a cavity etched into a surface, means wthin the cavity for converting light into an electrical signal, an electroconductive metal deposited on the surface of the semiconductor wafer around the opening of the cavity forming an electrical connection between the means for converting light into an electrical signal and circuitry etched into the wafer and an optical fiber inserted into the cavity and affixed to the semiconductor wafer.