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发明名称
PRODUCTION OF THIN-FILM SINGLE CRYSTAL
摘要
申请公布号
JPS6370415(A)
申请公布日期
1988.03.30
申请号
JP19860214906
申请日期
1986.09.11
申请人
SONY CORP
发明人
KANO YASUO;USUI SETSUO
分类号
H01L21/20;H01L21/263
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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