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发明名称
TREATMENT APPARATUS
摘要
申请公布号
JPS6370512(A)
申请公布日期
1988.03.30
申请号
JP19860213865
申请日期
1986.09.12
申请人
HITACHI LTD
发明人
KUSAKA TADAO
分类号
H01L21/31;H01L21/205
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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