PRODUCTION OF CUBIC BORON NITRIDE FILM

摘要

PURPOSE:To obtain a cubic boron nitride (CBN) film nearly free from impurities by a simple method, by projecting high frequency waves on a preheated mixture of a gas contg. B with a gas contg. N to convert the mixture into plasma and by depositing a CBN film on a heated substrate. CONSTITUTION:A gas contg. B such as B2H6 or BCl3 is mixed with a gas contg. N such as N2 or NH3 in 0.1-10 atomic ratio of B/N and the mixture is heated to >=1,000 deg.C preferably with a thermoelectron radiator. High frequency voltage is applied to the gaseous mixture preheated and pre-excited as mentioned above to convert the mixture into plasma and further excitation, dissociation and ionization are carried out. Various kinds of molecules and atoms are produced and especially chemically active free boron and nitrogen are brought into a reaction by the action of heat energy of a heated substrate to form stable SP<3> bond and to deposit and form a CBN film on the substrate.