| 摘要 |
<p>PURPOSE:To enable highly accurate measurement of reflectance at a fine area part of a sample, by using the quantity of light reflected at a measuring position of the sample and that from a material with known reflectance to perform a computation. CONSTITUTION:Light from a light source 1 is reflected on a half mirror 7 through a condenser lens 2 and a stop 3 to be focused on a sample 5 by an objective lens 4. Light reflected from the sample 5 passes through the half mirror 7 and a part thereof is reflected on a half mirror 8 into a photo detector 11 to be fed to a power meter 12 as electric output. On the other hand, the light passing through the half mirror 8 is received by a camera tube 9 and the surface of the sample 5 is projected onto a cathode-ray tube 10. A sample base 6 is operated observing a video thereof to set a light spot at a desired position on the sample 5 and an indication P2 of the power meter 12 is read out. Then, material with the known reflectance is set on the sample base 6 and likewise an indication P1 of the power meter 12 is read out. Moreover, an indication P0 of the power meter 12 is read without anything on the sample base 6. The reflectance of the sample 5 can be determined by a specified formula from these indication values P0, P1 and P2.</p> |
