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经营范围
发明名称
PLASMA PROCESSOR
摘要
申请公布号
JPS6365624(A)
申请公布日期
1988.03.24
申请号
JP19860209836
申请日期
1986.09.05
申请人
MITSUBISHI ELECTRIC CORP
发明人
NAKANISHI KOICHIRO;ODERA HIROKI;HANAZAKI MINORU
分类号
H01L21/302;H01L21/205;H01L21/3065;H01L21/31
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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