| 摘要 |
This invention pertains to an improved scanning device which uses a S shaped flexure (S-flex). The use of the S-flexures in opposition provides a very rigid structure that is significantly lower in cross axial error displacement and also halves the radius of gyration which in turn provides for highly accurate scans at very high resonant frequencies. The resonant scanner also can have high levels of deflection with minimal wobble which opens new areas of use. This scanner is without bearings and the stress loads on the spring members are significantly lower than previously available at the same accuracy level and the shape of the S-flex members readily lends to attachment of mirrors or other scanning devices. Improvements in the index of performance of 5 to 20 times the performance of currently available scanners are possible with the invention.
|
