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发明名称
ETCHING SYSTEM
摘要
申请公布号
JPS6364320(A)
申请公布日期
1988.03.22
申请号
JP19860207477
申请日期
1986.09.04
申请人
ELNA CO LTD
发明人
KOIKE ATSUSHI;HIGUCHI TOSHIO;TSUCHIYA TAKASHI;HOTTA HIROSHI
分类号
C25F7/00;C25F3/04;H01G13/00
主分类号
C25F7/00
代理机构
代理人
主权项
地址
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