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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6362313(A)
申请公布日期
1988.03.18
申请号
JP19860207087
申请日期
1986.09.03
申请人
FUJITSU LTD
发明人
YAMAMOTO TATSU;NANBU KAZUO
分类号
H01L21/26;B82B1/00;H01L21/203
主分类号
H01L21/26
代理机构
代理人
主权项
地址
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