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发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPS6360275(A)
申请公布日期
1988.03.16
申请号
JP19860204595
申请日期
1986.08.29
申请人
SHIMADZU CORP
发明人
UEDA EISUKE
分类号
C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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